Surface micromachining and characterization of pyroelectric infrared ray focal plane array utilizing Pb(Zr0.3Ti0.7)O3 thin films

Sang-Ouk Ryu; Seong-Mok Cho; In-Kyu You; Sung-Min Yoon; Kwi-Dong Kim; Byoung-Gon Yu

doi:10.1117/12.507058

8 December 2003 Surface micromachining and characterization of pyroelectric infrared ray focal plane array utilizing Pb(Zr_0.3Ti_0.7)O₃ thin films

Sang-Ouk Ryu, Seong-Mok Cho, In-Kyu You, Sung-Min Yoon, Kwi-Dong Kim, Byoung-Gon Yu

Author Affiliations +

Proceedings Volume 5209, Materials for Infrared Detectors III; (2003) https://doi.org/10.1117/12.507058
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

We have developed surface micromachined Infrared ray (IR) focal plane array (FPA), in which single SiO₂ layer works as an IR absorbing plate and Pb(Zr_0.3Ti_0.7)O₃ thin film served as a thermally sensitive material. There are some advantages of applying SiO₂ layer as an IR absorbing layer. First of all, the SiO₂ has good IR absorbance within 8 ~ 12 μm spectrum range. Measured value showed about 60% absorbance of incident IR spectrum in the range. SiO₂ layer has another important merit when applied to the top of Pt/PZT/Pt stack because it works also as a supporting membrane. Consequently, the IR absorbing layer forms one body with membrane structure, which simplifies the whole MEMS process and gives robustness to the structure.

Citation Download Citation

Sang-Ouk Ryu, Seong-Mok Cho, In-Kyu You, Sung-Min Yoon, Kwi-Dong Kim, and Byoung-Gon Yu "Surface micromachining and characterization of pyroelectric infrared ray focal plane array utilizing Pb(Zr_0.3Ti_0.7)O₃ thin films", Proc. SPIE 5209, Materials for Infrared Detectors III, (8 December 2003); https://doi.org/10.1117/12.507058

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