Generation of uniformly spaced and nanosized structures by interfering femtosecond laser beams

Yoshiki Nakata; Tatsuo Okada; Mitsuo Maeda

doi:10.1117/12.531639

15 July 2004 Generation of uniformly spaced and nanosized structures by interfering femtosecond laser beams

Yoshiki Nakata, Tatsuo Okada, Mitsuo Maeda

Proceedings Volume 5339, Photon Processing in Microelectronics and Photonics III; (2004) https://doi.org/10.1117/12.531639
Event: Lasers and Applications in Science and Engineering, 2004, San Jose, Ca, United States

Abstract

To correlate femtosecond laser beams in wide region and achieve laser ablation, beam correlators based on coherent optical system were developed. By processing thin films using the systems, uniformly spaced and nano-sized structures were generated. The generated structures were nanohole, grating, nanobump, bead on bump, standing bead. The shape of the structure changed on changing the laser fluence, the number of beams, and the correlation parameters. By peeling the structures, nano-sized materials such as nanomesh and nanobelt were generated.

Citation Download Citation

Yoshiki Nakata, Tatsuo Okada, and Mitsuo Maeda "Generation of uniformly spaced and nanosized structures by interfering femtosecond laser beams", Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, (15 July 2004); https://doi.org/10.1117/12.531639

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