Robust and efficient image processing scheme for electron beam LSI wafer pattern inspection

Takashi Hiroi; Munenori Fukunishi

doi:10.1117/12.534662

24 May 2004 Robust and efficient image processing scheme for electron beam LSI wafer pattern inspection

Takashi Hiroi, Munenori Fukunishi

Proceedings Volume 5375, Metrology, Inspection, and Process Control for Microlithography XVIII; (2004) https://doi.org/10.1117/12.534662
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

Electron beam-based wafer pattern inspection systems have the major advantage of allowing for the inspection of internal electric properties. However, charge-up of the wafer resulting from the use of an electron beam significantly influences inspection and remains a challenging issue. As an alternative approach to strict charge control, the authors propose a new inspection method that is capable of error-free, one-time inspection for recipe preparation, and which provides high-efficiency defect review and low error ratio inspection. Inspection is carried out at a higher-than-expected sensitivity, and defect candidate images are stored by a defect image analyzer (DIA). After inspection, the stored information contains both actual defects and nuisance defects. The distribution of candidate defects is displayed on a wafer map and the operator reviews the stored images and high-resolution review images on demand in order to check whether defects are true or nuisance defects. If necessary, the operator then adjusts the detection sensitivity and the system re-judges the stored data, displaying the modified wafer map to screen. In this way, the proposed system is robust against sensitivity drift caused by charge-up, and offers efficient, low error ratio inspection.

Citation Download Citation

Takashi Hiroi and Munenori Fukunishi "Robust and efficient image processing scheme for electron beam LSI wafer pattern inspection", Proc. SPIE 5375, Metrology, Inspection, and Process Control for Microlithography XVIII, (24 May 2004); https://doi.org/10.1117/12.534662

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