A study on the dissolution inhibition of poly norbornene hexafluoroisopropanol in aqueous base solutions

Medhat A. Toukhy; Joseph Oberlander; Dalil Rahman; Francis M. Houlihan

doi:10.1117/12.537077

14 May 2004 A study on the dissolution inhibition of poly norbornene hexafluoroisopropanol in aqueous base solutions

Medhat A. Toukhy, Joseph Oberlander, Dalil Rahman, Francis M. Houlihan

Proceedings Volume 5376, Advances in Resist Technology and Processing XXI; (2004) https://doi.org/10.1117/12.537077
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

It is confirmed that strong inhibitors must not only interact with the polymer but also are highly hydrophobic. A proportional relationship was shown between the inhibition and log P of different additives. In general, PAGs also follow this relationship, however triphenylsulfonium PAGs appear to be less effective inhibitors than bis-t-butylphenyliodonium PAGs having the same anions.

Citation Download Citation

Medhat A. Toukhy, Joseph Oberlander, Dalil Rahman, and Francis M. Houlihan "A study on the dissolution inhibition of poly norbornene hexafluoroisopropanol in aqueous base solutions", Proc. SPIE 5376, Advances in Resist Technology and Processing XXI, (14 May 2004); https://doi.org/10.1117/12.537077

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