Flexible MRC rules for OPC

Nicolas B. Cobb; Eugene Miloslavsky; George Lippincott

doi:10.1117/12.568420

6 December 2004 Flexible MRC rules for OPC

Nicolas B. Cobb, Eugene Miloslavsky, George Lippincott

Proceedings Volume 5567, 24th Annual BACUS Symposium on Photomask Technology; (2004) https://doi.org/10.1117/12.568420
Event: Photomask Technology, 2004, Monterey, California, United States

Abstract

Optical Proximity Correction (OPC) can be formulated as a constrained optimization problem. The constraints are mask constraint rules for space and width. These are sometimes called Mask Rule Checks (MRC), or Design Rule Checks (DRC). At 90nm and below, intelligent constraint handling is required for good OPC. In this paper, we show a technique for OPC constraint checking which is built in to the OPC feedback algorithm. The system is flexible enough to allow relaxed rules for corner-to-corner checking versus edge-to-edge checking. Also, the system can categorize checks by the length of the edges being compared. Lastly, the system can create special checks from line-ends to other features, or any user-defined edge type to any other user-defined edge type. In addition, we present a method for multiple layer enclosure rules which can be used for multiple exposure OPC. These enclosure constraints are useful for assurance of overlay tolerance.

Citation Download Citation

Nicolas B. Cobb, Eugene Miloslavsky, and George Lippincott "Flexible MRC rules for OPC", Proc. SPIE 5567, 24th Annual BACUS Symposium on Photomask Technology, (6 December 2004); https://doi.org/10.1117/12.568420

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