Study on MEMS optical measurement system

Changlin Leng; Guoxiong Zhang; Fusheng Yu; Chenzhi Jiang; Ying Zhong

doi:10.1117/12.575290

11 February 2005 Study on MEMS optical measurement system

Changlin Leng, Guoxiong Zhang, Fusheng Yu, Chenzhi Jiang, Ying Zhong

Proceedings Volume 5625, Optical Transmission, Switching, and Subsystems II; (2005) https://doi.org/10.1117/12.575290
Event: Asia-Pacific Optical Communications, 2004, Beijing, China

Abstract

A optical measurement system of Micro-electro-mechanical system (MEMS) motion is demonstrated to increase the efficiency of MEMS design and manufacturing. The system is developed based on the heterodyne laser Doppler technology, and frequency shift of 40MHz is introduced by a Bragg cell. The paper introduced MEMS vibration theory, designed optical structure and electronic circuit, and obtained the linear relation between the Doppler shift and the target velocity. Experiments on driving and measuring double-ended tuning fork resonator were carried out. The resonator is driven by using electrostatic force at its natural frequency 2.4KHz. Experimental results indicate that the measure system can be used to measure MEMS motion with high accuracy.

Citation Download Citation

Changlin Leng, Guoxiong Zhang, Fusheng Yu, Chenzhi Jiang, and Ying Zhong "Study on MEMS optical measurement system", Proc. SPIE 5625, Optical Transmission, Switching, and Subsystems II, (11 February 2005); https://doi.org/10.1117/12.575290

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available