F<sub>2</sub>-laser writing of silica optical waveguides in silicone rubber

Masayuki Okoshi; Jianzhao Li; Peter Robert Herman

doi:10.1117/12.589392

12 April 2005 F₂-laser writing of silica optical waveguides in silicone rubber

Masayuki Okoshi, Jianzhao Li, Peter Robert Herman

Author Affiliations +

Proceedings Volume 5713, Photon Processing in Microelectronics and Photonics IV; (2005) https://doi.org/10.1117/12.589392
Event: Lasers and Applications in Science and Engineering, 2005, San Jose, California, United States

Abstract

F₂-laser writing of silica (SiO₂) optical waveguides has been successfully demonstrated on the surface of silicone [(SiO(CH₃)₂)_n] rubber by the photochemical modification of silicone into silica. The 2-mm-thick silicone rubber was exposed to the 157-nm F₂-laser beam through a thin (~0.2 mm) air layer. A proximity Cr-on-CaF₂ photomask with 8- to 16-micron-wide slits controlled the exposure size to define the width of the silica waveguide. Optimum laser conditions to generate crack-free waveguides with good transparency were found by varying the laser fluence, pulse repetition rate and total exposure. The optimized waveguides were found to guide both red (~635-nm) and infrared (~1550-nm) wavelengths with light end-fired from standard single-mode fiber.

Citation Download Citation

Masayuki Okoshi, Jianzhao Li, and Peter Robert Herman "F₂-laser writing of silica optical waveguides in silicone rubber", Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); https://doi.org/10.1117/12.589392

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE