Vibrating RF MEMS overview: applications to wireless communications

Clark T.-C. Nguyen

doi:10.1117/12.608015

22 January 2005 Vibrating RF MEMS overview: applications to wireless communications

Clark T.-C. Nguyen

Proceedings Volume 5715, Micromachining and Microfabrication Process Technology X; (2005) https://doi.org/10.1117/12.608015
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Micromechanical RF filters and reference oscillators based on recently demonstrated vibrating on-chip micromechani-cal resonators with Q's >10,000 at 1.5 GHz, are described as an attractive solution to the increasing count of RF components (e.g., filters) expected to be needed by future multi-band wireless devices. With Q's this high in on-chip abun-dance, such devices might also enable a paradigm-shift in transceiver design where the advantages of high-Q are emphasized, rather than suppressed, resulting in enhanced robustness and power savings. An overview of the latest in vi-brating RF MEMS technology is presented with an addendum on remaining issues to be addressed for insertion into tomorrow's handsets.

Citation Download Citation

Clark T.-C. Nguyen "Vibrating RF MEMS overview: applications to wireless communications", Proc. SPIE 5715, Micromachining and Microfabrication Process Technology X, (22 January 2005); https://doi.org/10.1117/12.608015

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