Three-dimensional measurement by tilting and moving objective lens in CD-SEM(III)

K. Abe; Y. Tsuruga; S. Okada; T. Noma; H. Aoki; H. Fujii; H. Koike; A. Hamaguchi; Y. Yamazaki

doi:10.1117/12.600336

10 May 2005 Three-dimensional measurement by tilting and moving objective lens in CD-SEM(III)

K. Abe, Y. Tsuruga, S. Okada, T. Noma, H. Aoki, H. Fujii, H. Koike, A. Hamaguchi, Y. Yamazaki

Author Affiliations +

Proceedings Volume 5752, Metrology, Inspection, and Process Control for Microlithography XIX; (2005) https://doi.org/10.1117/12.600336
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

Necessity of nondestructive three-dimensional measurement methodology has increased. We propose three-dimensional measurement by CD-SEM with T-MOL (Tilting and Moving Objective Lens) electron optics system. We designed the new objective lens, and confirmed that the new electron optics system provides 3.0nm resolution at tilting angle of 10 degrees. Moreover, we developed the multi-matching technique based on the several stereographical tilted images. In this paper, we report the comparison between the new technique and the conventional one, as well as the technique’s capability using the actual semiconductor devices.

Citation Download Citation

K. Abe, Y. Tsuruga, S. Okada, T. Noma, H. Aoki, H. Fujii, H. Koike, A. Hamaguchi, and Y. Yamazaki "Three-dimensional measurement by tilting and moving objective lens in CD-SEM(III)", Proc. SPIE 5752, Metrology, Inspection, and Process Control for Microlithography XIX, (10 May 2005); https://doi.org/10.1117/12.600336

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE