Investigation of ion-implanted layers by x-ray reflectometry method

A. G. Touryanski; N. N. Gerasimenko; S. A. Aprelov; I. V. Pirshin; A. I. Poprygo; V. M. Senkov

doi:10.1117/12.637912

6 December 2006 Investigation of ion-implanted layers by x-ray reflectometry method

A. G. Touryanski, N. N. Gerasimenko, S. A. Aprelov, I. V. Pirshin, A. I. Poprygo, V. M. Senkov

Proceedings Volume 5943, X-ray and Neutron Capillary Optics II; 59430G (2006) https://doi.org/10.1117/12.637912
Event: X-ray and Neutron Capillary Optics II, 2004, Zvenigorod, Russian Federation

Abstract

Investigation of ion-implanted structures by means of X-ray reflectometry was carried out. For this purpose the new methods of reflectivity measurements and the experimental data treatment were developed: double beam method of X-ray reflectometry and the subtraction of trend. The depths or widths of implanted layers, its average density were determined.

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A. G. Touryanski, N. N. Gerasimenko, S. A. Aprelov, I. V. Pirshin, A. I. Poprygo, and V. M. Senkov "Investigation of ion-implanted layers by x-ray reflectometry method", Proc. SPIE 5943, X-ray and Neutron Capillary Optics II, 59430G (6 December 2006); https://doi.org/10.1117/12.637912

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