Paper
23 February 2006 Ultra-deep plasma-assisted drilling of solids by high-power nanosecond lasers: experimental studies
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Abstract
A new mechanism of ultra-deep (up to tens of microns per pulse, sub-mm total hole depths) plasma-assisted ablative drilling of optically opaque and transparent materials by high-power nanosecond lasers proposed by Kudryashov et al. has been studied experimentally using average drilling rate and photoacoustic measurements. In the drilling experiments, average multi-micron crater depth per laser shot and instantaneous recoil pressure of ablated products have been measured as a function of laser energy at constant focusing conditions using optical transmission and contact photo acoustic techniques, respectively. Experimental results of this work support the theoretical explanation of the ultra-deep drilling mechanism as a number of stages including ultra-deep "non-thermal" energy delivery by a short-wavelength radiation of the surface high-temperature ablative plasma, bulk heating and melting of these materials, accompanied by the following subsurface boiling in the melt pool and resulting melt expulsion off of the target.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stanley Paul, Kevin Lyon, Sergey I. Kudryashov, and Susan D. Allen "Ultra-deep plasma-assisted drilling of solids by high-power nanosecond lasers: experimental studies", Proc. SPIE 6107, Laser-based Micropackaging, 610709 (23 February 2006); https://doi.org/10.1117/12.647003
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Cited by 2 scholarly publications.
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KEYWORDS
Laser drilling

Silicon

Plasma

Acoustics

Pulsed laser operation

Glasses

Laser ablation

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