High-performance blazed GxL device for large-area laser projector

Yasuyuki Ito; Kunihiko Saruta; Hiroto Kasai; Masato Nishida; Masanari Yamaguchi; Keitaro Yamashita; Ayumu Taguchi; Kazunao Oniki; Hitoshi Tamada

doi:10.1117/12.645463

23 January 2006 High-performance blazed GxL^TM device for large-area laser projector

Yasuyuki Ito, Kunihiko Saruta, Hiroto Kasai, Masato Nishida, Masanari Yamaguchi, Keitaro Yamashita, Ayumu Taguchi, Kazunao Oniki, Hitoshi Tamada

Author Affiliations +

Proceedings Volume 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV; 611401 (2006) https://doi.org/10.1117/12.645463
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

A blazed GxL device is described that has high optical efficiency (>70% for RGB lasers), and high contrast ratio (> 10,000:1), and that is highly reliable when used in a large-area laser projection system. The key features were a robust design and precise stress control technology to maintain a uniform shape (bow and tilt) of more than 6,000 ribbons, a 0.25-μm CMOS compatible fabrication processing and planarization techniques to reduce fluctuation of the ribbons, and a reliable Al-Cu reflective film that provided protection against a high-power laser. No degradation in characteristics of the GxL device was observed after operating a 5,000- lumen projector for 2,000 hours and conducting 2,000 temperature cycling tests at -20°C and +80°C. Consequently, the world's largest laser projection screen with a size of 2005 inches (10 m × 50 m) and 6 million pixels (1,080 × 5,760) was demonstrated at the 2005 World Exposition in Aichi, Japan.

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Yasuyuki Ito, Kunihiko Saruta, Hiroto Kasai, Masato Nishida, Masanari Yamaguchi, Keitaro Yamashita, Ayumu Taguchi, Kazunao Oniki, and Hitoshi Tamada "High-performance blazed GxL^TM device for large-area laser projector", Proc. SPIE 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV, 611401 (23 January 2006); https://doi.org/10.1117/12.645463

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