A microoptical scanner

Ying Huang; Sihai Chen; Sihua Xiang; Xinjian Yi

doi:10.1117/12.676532

23 February 2006 A microoptical scanner

Ying Huang, Sihai Chen, Sihua Xiang, Xinjian Yi

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 615047 (2006) https://doi.org/10.1117/12.676532
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

Rotational prisms or reflectors are used for conventional optical scanners. Their disadvantages are large size, low scanning speed and high power consumption. In the paper a microoptical scanner based on the integration of piezoelectrical driver and microlens arrays is described. The microlens arrays consist of a convex microlens array and a cocave microlens array with 256×256 elements respectively. Each element dimension is 50×50 μm². The scanner is driven by a piezoelectrical(PZT) crystal. A PA90 amplifier is controlled by an input signal produced by a single chip computer. The amplifier supplies a high voltage pulse signal to driving the PZT. The scanning frequency can reach 200Hz to 300Hz and the scanner's size is a few cubic centimeters.

Citation Download Citation

Ying Huang, Sihai Chen, Sihua Xiang, and Xinjian Yi "A microoptical scanner", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 615047 (23 February 2006); https://doi.org/10.1117/12.676532

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