Analysis for the characteristic of a four-quadrant photo-detector applied to a novel laser aligning system

Xiuqing Wang; De Xu; Min Tan; Yun Liu

doi:10.1117/12.676740

23 February 2006 Analysis for the characteristic of a four-quadrant photo-detector applied to a novel laser aligning system

Xiuqing Wang, De Xu, Min Tan, Yun Liu

Author Affiliations +

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 61504V (2006) https://doi.org/10.1117/12.676740
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

A novel alignment method is provided for the mask-plate alignment with two four-quadrant photodetectors. The location of lasers and four-quadrant photo-detectors are fixed. The mask-plate, which is carried by a manipulator with an adjustable platform, is between the lasers and the four-quadrant photo-detectors. Through two transparent reticle alignment marks, the laser beam is projected onto the active area of the four-quadrant photo-detectors. According to the output signals of the four-quadrant photo-detectors, the errors of the mask's position and pose are calculated out. So the mask-plate's position and pose are adjusted to implement alignment by the mask-plate-transferring manipulator with the adjustable platform. The alignment algorithm and the ε-Δ characteristic curve were deduced.

Citation Download Citation

Xiuqing Wang, De Xu, Min Tan, and Yun Liu "Analysis for the characteristic of a four-quadrant photo-detector applied to a novel laser aligning system", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61504V (23 February 2006); https://doi.org/10.1117/12.676740

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