No such thing as sigma: flowdown and measurement of surface roughness requirements

Michael G. Dittman; Frank Grochocki; Kathleen Youngworth

doi:10.1117/12.678314

7 September 2006 No such thing as σ: flowdown and measurement of surface roughness requirements

Michael G. Dittman, Frank Grochocki, Kathleen Youngworth

Proceedings Volume 6291, Optical Systems Degradation, Contamination, and Stray Light: Effects, Measurements, and Control II; 62910P (2006) https://doi.org/10.1117/12.678314
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

The standard use of the parameter σ for the rms surface roughness of optics has obscured the fact that the effective surface roughness is a function of both the measurement wavelength and bandwidth. A more appropriate method for the flowdown of surface specifications from stray light requirements is presented. Acceptance test methods for validating surface properties of optics using a Zygo NewView Profilometer are also discussed.

Citation Download Citation

Michael G. Dittman, Frank Grochocki, and Kathleen Youngworth "No such thing as σ: flowdown and measurement of surface roughness requirements", Proc. SPIE 6291, Optical Systems Degradation, Contamination, and Stray Light: Effects, Measurements, and Control II, 62910P (7 September 2006); https://doi.org/10.1117/12.678314

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