Nanosecond Proton And Helium Ion Pulse Radiolysis Studies On Polystyrene

Seiichi Tagawa; Noriyuki Kouchi; Yasushi Aoki; Hiromi Shibata

doi:10.1117/12.963621

9 July 1986 Nanosecond Proton And Helium Ion Pulse Radiolysis Studies On Polystyrene

Seiichi Tagawa, Noriyuki Kouchi, Yasushi Aoki, Hiromi Shibata

Proceedings Volume 0631, Advances in Resist Technology and Processing III; (1986) https://doi.org/10.1117/12.963621
Event: 1986 Microlithography Conferences, 1986, Santa Clara, United States

Abstract

The interaction of ion beams with polystyrene has been studied by using product analysis and ion beam pulse radiolysis, which can directly observe reactive intermediates produced by high energy ion irraciation. The resisit sensitivity per unit absorption dose increases with increasing stopping power or LET (linear energy transfer). The interaction between excited states (and ionic species) produced by high density electronic excitation of ion beams increases with increasing stopping power or LET and high density electronic excitation was confirmed directly for the first time on the basis of ion beam pulse radiolysis data.

Citation Download Citation

Seiichi Tagawa, Noriyuki Kouchi, Yasushi Aoki, and Hiromi Shibata "Nanosecond Proton And Helium Ion Pulse Radiolysis Studies On Polystyrene", Proc. SPIE 0631, Advances in Resist Technology and Processing III, (9 July 1986); https://doi.org/10.1117/12.963621

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