Mechanical Properties Of Coatings Revealed By Ultra Low Load (VICKERS) Hardness Measurements In A SEM

H Bangert; A Wagendristel; K H Guenther

doi:10.1117/12.938369

13 October 1986 Mechanical Properties Of Coatings Revealed By Ultra Low Load (VICKERS) Hardness Measurements In A SEM

H Bangert, A Wagendristel, K H Guenther

Proceedings Volume 0652, Thin Film Technologies II; (1986) https://doi.org/10.1117/12.938369
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

Some outstandi,,g features of a new device for hardness measurements in a SEM are presented and its capability in optical applications is demonstrated. It will be shown that both the quantitative hardness deterhuination fmail. imprint size as well as a visual observation of the imprint topology are essential for quality assessment.

Citation Download Citation

H Bangert, A Wagendristel, and K H Guenther "Mechanical Properties Of Coatings Revealed By Ultra Low Load (VICKERS) Hardness Measurements In A SEM", Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); https://doi.org/10.1117/12.938369

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