Nonlinear errors of passive homodyne polarized laser interferometer

Jun Yang; Bing Wu; Zhi-hai Liu; Li-bo Yuan

doi:10.1117/12.725695

5 March 2007 Nonlinear errors of passive homodyne polarized laser interferometer

Jun Yang, Bing Wu, Zhi-hai Liu, Li-bo Yuan

Author Affiliations +

Proceedings Volume 6595, Fundamental Problems of Optoelectronics and Microelectronics III; 659509 (2007) https://doi.org/10.1117/12.725695
Event: Fundamental Problems of Optoelectronics and Microelectronics III, 2006, Harbin, China

Abstract

Based on Jones matrices theory, the paper researches the error source and action mechanism of the polarized interferometer in nanometer level measurement. It opens the door for selecting optical component, adjusting light set-up and compensating error. According to the theoretical analysis, the main reason that causes error is degeneration of polarization that the imperfect performance of optical components and imperfect adjusting bring. Especially the different delay angle happens more obviously. The characteristic of the passive homodyne laser interferometer based on the polarized phase-shift is that the output of interferometer is four-channel signals in quadrature. Using this characteristic, through strict selecting and fine adjusting components and differential signal processing, the interferometer can perform nanometer measurement.

Citation Download Citation

Jun Yang, Bing Wu, Zhi-hai Liu, and Li-bo Yuan "Nonlinear errors of passive homodyne polarized laser interferometer", Proc. SPIE 6595, Fundamental Problems of Optoelectronics and Microelectronics III, 659509 (5 March 2007); https://doi.org/10.1117/12.725695

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE