Micro- and nanoprocessing of organic polymers using a compact laser plasma EUV source equipped with EUV optical systems

Henryk Fiedorowicz; Andrzej Bartnik; Krzysztof Jakubczak; Roman Jarocki; Jerzy Kostecki; Ladislav Pina; Rafał Rakowski; Anna Szczurek; Mirosław Szczurek

doi:10.1117/12.735588

17 September 2007 Micro- and nanoprocessing of organic polymers using a compact laser plasma EUV source equipped with EUV optical systems

Henryk Fiedorowicz, Andrzej Bartnik, Krzysztof Jakubczak, Roman Jarocki, Jerzy Kostecki, Ladislav Pina, Rafał Rakowski, Anna Szczurek, Mirosław Szczurek

Author Affiliations +

Proceedings Volume 6703, Ultrafast X-Ray Sources and Detectors; 67030C (2007) https://doi.org/10.1117/12.735588
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

Results on micro- and nanoprocessing of organic polymers with extreme ultraviolet (EUV) radiation from a compact laser plasma EUV source based on a gas puff target are presented in the paper. Processing of polymers is connected with non-thermal ablation under the influence of energetic EUV photons. The process can be useful for practical applications as it makes possible to produce structures with sub-micron spatial resolution that is not possible using the thermal ablation. The new technology will be used for production of photonic microstructures and for modification of polymer surfaces for biomedical applications.

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Henryk Fiedorowicz, Andrzej Bartnik, Krzysztof Jakubczak, Roman Jarocki, Jerzy Kostecki, Ladislav Pina, Rafał Rakowski, Anna Szczurek, and Mirosław Szczurek "Micro- and nanoprocessing of organic polymers using a compact laser plasma EUV source equipped with EUV optical systems", Proc. SPIE 6703, Ultrafast X-Ray Sources and Detectors, 67030C (17 September 2007); https://doi.org/10.1117/12.735588

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