High-productive laser-assisted microtechnology of superdeep hole drilling

Tasoltan T. Basiev; Alexander V. Fedin; Andrey V. Gavrilov; Vyacheslav V. Osiko; Sergey N. Smetanin; Sergey A. Solokhin

doi:10.1117/12.752202

28 June 2007 High-productive laser-assisted microtechnology of superdeep hole drilling

Tasoltan T. Basiev, Alexander V. Fedin, Andrey V. Gavrilov, Vyacheslav V. Osiko, Sergey N. Smetanin, Sergey A. Solokhin

Proceedings Volume 6732, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies; 67321K (2007) https://doi.org/10.1117/12.752202
Event: International Conference on Lasers, Applications, and Technologies '07, 2007, Minsk, Belarus

Abstract

We present a new microtechnology of hole drilling based on Nd:YAG laser with self-adaptive loop resonator and scanned passive LiF:F₂^- Q-switch. It allowed us to provide a high-productive laser drilling of 100-micron holes deeper than 10 mm at average drilling rate higher then one micron per laser pulse.

Citation Download Citation

Tasoltan T. Basiev, Alexander V. Fedin, Andrey V. Gavrilov, Vyacheslav V. Osiko, Sergey N. Smetanin, and Sergey A. Solokhin "High-productive laser-assisted microtechnology of superdeep hole drilling", Proc. SPIE 6732, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies, 67321K (28 June 2007); https://doi.org/10.1117/12.752202

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