Paper
23 December 1986 Ambient Temperature Deposition Of MgF2 With Noble And Fluorocarbon Ion Assistance
U J Gibson, C M Kennemore III
Author Affiliations +
Abstract
We have investigated the properties of magnesium fluoride films made using ion assisted deposition, with argon or Freon as the source gas. The effect of the ion species and residual gases on the chemical, physical, and optical properties have been determined. For all films, the optical performance is strongly depen-dent on the presence of residual oxygen-bearing gases. For the Freon bombarded films the incorporation of carbon is not seen to degrade their transparency, and a more stoichiometric Mg:F ratio is acheived.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
U J Gibson and C M Kennemore III "Ambient Temperature Deposition Of MgF2 With Noble And Fluorocarbon Ion Assistance", Proc. SPIE 0678, Optical Thin Films II: New Developments, (23 December 1986); https://doi.org/10.1117/12.939547
Lens.org Logo
CITATIONS
Cited by 7 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Oxygen

Ions

Absorption

Argon

Fluorine

Magnesium fluoride

Magnesium

Back to Top