A high-throughput contact-hole resolution metric for photoresists: full-process sensitivity study

Christopher N. Anderson; Patrick P. Naulleau

doi:10.1117/12.768551

26 March 2008 A high-throughput contact-hole resolution metric for photoresists: full-process sensitivity study

Christopher N. Anderson, Patrick P. Naulleau

Author Affiliations +

Proceedings Volume 6923, Advances in Resist Materials and Processing Technology XXV; 69230Z (2008) https://doi.org/10.1117/12.768551
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

The ability to accurately quantify the intrinsic resolution of chemically amplified photoresists is critical for the optimization of resists for extreme ultraviolet (EUV) lithography. We have recently reported on two resolution metrics that have been shown to extract resolution numbers consistent with direct observation. In this paper we examine the previously reported contact-hole resolution metric and explore the sensitivity of the metric to potential error sources associated with the experimental side of the resolution extraction process. For EUV exposures at the SEMATECH Berkeley microfield exposure tool, we report a full-process error-bar in extracted resolution of 1.75 nm RMS and verify this result experimentally.

Citation Download Citation

Christopher N. Anderson and Patrick P. Naulleau "A high-throughput contact-hole resolution metric for photoresists: full-process sensitivity study", Proc. SPIE 6923, Advances in Resist Materials and Processing Technology XXV, 69230Z (26 March 2008); https://doi.org/10.1117/12.768551

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE