Non-periodic multilayer coatings in EUV, soft x-ray and x-ray range

Zhanshan Wang

doi:10.1117/12.797156

25 September 2008 Non-periodic multilayer coatings in EUV, soft x-ray and x-ray range

Zhanshan Wang

Author Affiliations +

Proceedings Volume 7101, Advances in Optical Thin Films III; 710110 (2008) https://doi.org/10.1117/12.797156
Event: Optical Systems Design, 2008, Glasgow, Scotland, United Kingdom

Abstract

Non-periodic multilayer coatings offer engineer great flexibility to achieve tailored spectral performance in EUV, soft X-ray and X-ray region. We have developed a variety of non-periodic multilayer mirrors for use as optical key components for polarization-sensitive studies, Kirkpatrick-Baez microscope, Earth's magnetosphere observation and reflection of sub-femtosecond pulses. To find optimal distribution of layer thicknesses for a given spectral response, several numerical algorithms, such as simplex, simulated annealing, genetic and Levenberg Marquardt, have been explored to solve the reverse optimization problems. The designed non-periodic multilayers were prepared by use of a direct current magnetron sputtering system and characterized by grazing incidence x-ray reflectometry analysis. The synchrotron measurements of these samples were performed at the National Synchrotron Radiation Laboratory, China and at the beamline UE56/1-PGM-1 at BESSY II Berlin, Germany. This paper covers our recent results of design and fabrication of non-periodic multilayer coatings. And the mirror performance and limitations were also briefly reviewed.

Citation Download Citation

Zhanshan Wang "Non-periodic multilayer coatings in EUV, soft x-ray and x-ray range", Proc. SPIE 7101, Advances in Optical Thin Films III, 710110 (25 September 2008); https://doi.org/10.1117/12.797156

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