Failure analysis and simulation for micro-cantilever

Fengli Liu; Yongping Hao

doi:10.1117/12.819565

31 December 2008 Failure analysis and simulation for micro-cantilever

Fengli Liu, Yongping Hao

Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 71300S (2008) https://doi.org/10.1117/12.819565
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China

Abstract

Micro-cantilever structure is flexible and liable to be destroyed compared its volume with its area. Failure mode and effect analysis can be predicted at an early stage of the micro-beam design. Stiction is a main failure mode for cantilever in its manufacture process and operation. Under the load shock, if the contact length reached the limit length, the restoration energy in micro-cantilever couldn't resist the stiction energy, the micro-cantilever would stiction on the substrate. Pull-in was a main failure mode for electrostatic micro-cantilever. The pull-in voltage was obtained by mechanical and electrical couple analysis on the base of the FEM model.

Citation Download Citation

Fengli Liu and Yongping Hao "Failure analysis and simulation for micro-cantilever", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71300S (31 December 2008); https://doi.org/10.1117/12.819565

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