The quantitative assessment of small structure imaging ability by terahertz wave

Kun Yang; Guozhong Zhao; Chengsen Liang; Cunlin Zhang

doi:10.1117/12.806685

9 February 2009 The quantitative assessment of small structure imaging ability by terahertz wave

Kun Yang, Guozhong Zhao, Chengsen Liang, Cunlin Zhang

Proceedings Volume 7158, 2008 International Conference on Optical Instruments and Technology: Microelectronic and Optoelectronic Devices and Integration; 71580R (2009) https://doi.org/10.1117/12.806685
Event: International Conference of Optical Instrument and Technology, 2008, Beijing, China

Abstract

In this paper, the imaging ability of terahertz wave in time-domain spectroscopy (THz-TDS) imaging system is assessed by using the step-by-step scan imaging method to four small structures: thread, dots, round hole, and square on the focus of the imaging system. We utilize THz-TDS energy imaging model to acquire the energy distribution of terahertz wave passing through the different small structure, which can be use as a criterion of imaging ability. Theoretically, terahertz imaging technology possesses highly spatial resolution because the size of spot is inversely proportional to the frequency. Our experimental results also show that THz-TDS technology has a preferable spatial resolution on the millimeter scale. In addition, a more delicate and smooth image can be obtained by means of the nearest neighbor interpolation algorithm. A method to measure the size of target is provided. These results are important references for the further terahertz spectroscopy imaging research.

Citation Download Citation

Kun Yang, Guozhong Zhao, Chengsen Liang, and Cunlin Zhang "The quantitative assessment of small structure imaging ability by terahertz wave", Proc. SPIE 7158, 2008 International Conference on Optical Instruments and Technology: Microelectronic and Optoelectronic Devices and Integration, 71580R (9 February 2009); https://doi.org/10.1117/12.806685

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