Generation of nanostructured surfaces by interfering and no-interfering ultra-short pulse laser processing

Y. Nakata; K. Tsuchida; N. Miyanaga

doi:10.1117/12.813673

24 February 2009 Generation of nanostructured surfaces by interfering and no-interfering ultra-short pulse laser processing

Y. Nakata, K. Tsuchida, N. Miyanaga

Author Affiliations +

Proceedings Volume 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII; 72011F (2009) https://doi.org/10.1117/12.813673
Event: SPIE LASE: Lasers and Applications in Science and Engineering, 2009, San Jose, California, United States

Abstract

Top down technology of ultra-short pulse laser processing was applied to induce liquidly process and generate new nanostructures such as nano-waterdrop, nanocrown, and fine web structure. For example, a nano-waterdrop was generated by a single shot ps laser irradiation and had the narrow dieter of about 50 nm. In the case of nanocrown, whiskers were standing at the edge of a nanohole, and the diameter of the whiskers was around 100 nm. In addition, wavelength-sized web structure was generated in a single shot of femtosecond laser irradiation.

Citation Download Citation

Y. Nakata, K. Tsuchida, and N. Miyanaga "Generation of nanostructured surfaces by interfering and no-interfering ultra-short pulse laser processing", Proc. SPIE 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII, 72011F (24 February 2009); https://doi.org/10.1117/12.813673

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