Sinusoidal phase modulating interferometer for real-time surface profile measurement

Xing-Wen Tan; Guo-Tian He

doi:10.1117/12.828715

20 May 2009 Sinusoidal phase modulating interferometer for real-time surface profile measurement

Xing-Wen Tan, Guo-Tian He

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 72832I (2009) https://doi.org/10.1117/12.828715
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

The optical interferometry for surface profile measurement, with an ability of high-accuracy and non-contact measurement has a wide application in industrial production and scientific research. In this paper, a sinusoidal phase modulating(SPM) interferometer to realize real-time surface profile measurement is proposed, and its measurement principle is analyzed theoretically. In the SPM interferometer, the interference signal is detected by a high speed image sensor based on a low-speed CCD and discriminated by a signal processing circuit to obtain the phase of each measurement point on the surface. In experiments, the surface profile of an optical wedge was measured by the interferometer. For 30x30 measuring points, the measurement time is less than10ms. Repeatability of the measurement is 4.3nm. The usefulness of the interferometer is verified by the experimental results.

Citation Download Citation

Xing-Wen Tan and Guo-Tian He "Sinusoidal phase modulating interferometer for real-time surface profile measurement", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72832I (20 May 2009); https://doi.org/10.1117/12.828715

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KEYWORDS

Interferometers

Modulation

Signal detection

Signal processing

Scanning probe microscopy

Phase interferometry

Time metrology

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