All optically-driven MEMS deformable device via an array of photodetectors

Bahareh Haji-Saeed; Jed Khoury; Kenneth Vaccaro; Charles L. Woods; John Kierstead; Brian Krejca; Andrew Davis; William D. Goodhue

doi:10.1117/12.818596

30 April 2009 All optically-driven MEMS deformable device via an array of photodetectors

Bahareh Haji-Saeed, Jed Khoury, Kenneth Vaccaro, Charles L. Woods, John Kierstead, Brian Krejca, Andrew Davis, William D. Goodhue

Author Affiliations +

Proceedings Volume 7322, Photonic Microdevices/Microstructures for Sensing; 73220L (2009) https://doi.org/10.1117/12.818596
Event: SPIE Defense, Security, and Sensing, 2009, Orlando, Florida, United States

Abstract

We are in the process of developing an all optically driven, deformable mirror device through the integration of an array of photodetectors with an array of MEMS deformable mirror devices. In this paper we demonstrate the optical actuation of a single-pixel, deformable-mirror MEMS device through a direct cascade with a photodetector. Deformation is quasilinear at low light intensities, and saturates at higher intensities. We also describe the fabrication of an integrated device consisting of an all optically addressed deformable-mirror MEMS suspended over a p-i-n photodetector. Initial demonstration of optical actuation of the deformable mirror using the newly integrated device is also presented. We have fabricated several membrane materials, membrane structures, and photodetector arrays.

Citation Download Citation

Bahareh Haji-Saeed, Jed Khoury, Kenneth Vaccaro, Charles L. Woods, John Kierstead, Brian Krejca, Andrew Davis, and William D. Goodhue "All optically-driven MEMS deformable device via an array of photodetectors", Proc. SPIE 7322, Photonic Microdevices/Microstructures for Sensing, 73220L (30 April 2009); https://doi.org/10.1117/12.818596

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