What happens turning a 250µm thin piezo-stack sideways? An experimental and analytical approach to one-side-actuated piezoelectric micro drives, regarding electrode layouts and directions of deflection

Sandy Zähringer; Norbert Schwesinger

doi:10.1117/12.821320

18 May 2009 What happens turning a 250µm thin piezo-stack sideways? An experimental and analytical approach to one-side-actuated piezoelectric micro drives, regarding electrode layouts and directions of deflection

Sandy Zähringer, Norbert Schwesinger

Author Affiliations +

Proceedings Volume 7362, Smart Sensors, Actuators, and MEMS IV; 73620L (2009) https://doi.org/10.1117/12.821320
Event: SPIE Europe Microtechnologies for the New Millennium, 2009, Dresden, Germany

Abstract

This paper leads to a one-side-actuated piezoelectric membrane showing an upward deflection under forward bias. It is also shown that one-side-actuated piezoelectric membranes achieve comparable and higher deflections as common piezoelectric actuated membranes with similar dimensions. The piezoelectric substrate functions as complete active element, since it is both actuator and deflectable membrane, which offers an important simplification in the fabrication process.

Citation Download Citation

Sandy Zähringer and Norbert Schwesinger "What happens turning a 250µm thin piezo-stack sideways? An experimental and analytical approach to one-side-actuated piezoelectric micro drives, regarding electrode layouts and directions of deflection", Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620L (18 May 2009); https://doi.org/10.1117/12.821320

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