As the damage region of a sensor can be regarded as some sort of anomalistic aperture diaphragm, the reflectivity model
of the sensor can be established, where the optical path of a surface damage detection system can be taken as a
propagation process for a plane wave through a defocused optical lens and is reflected back to the return place. Based on
the theory of angular spectrum diffraction, the diffraction transmission formulas for a plane wave through the cat-eye
system can be derived by taking two-dimensional discrete Fourier transfer. The regulations on the variation of the
intensity distribution of the cat-eye reflected light with different damage conditions of the sensor can then be given, and
the effect of the focal shift can be analyzed. Experiment results show the intensity distribution of cat-eye reflected light
has a direct relationship with the profile of the damage region and the amplificatory effect for the small damage region is
of direct ratio with the focal shift. Moreover, the proposed method can be straightforwardly utilized for the surface
damage effect detection of a sensor in optical lens without disconnecting it.
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