Individually controlled multi-focus laser processing for two-photon polymerization

Kotaro Obata; Jürgen Koch; Boris N. Chichkov

doi:10.1117/12.842117

17 February 2010 Individually controlled multi-focus laser processing for two-photon polymerization

Kotaro Obata, Jürgen Koch, Boris N. Chichkov

Author Affiliations +

Proceedings Volume 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV; 75840L (2010) https://doi.org/10.1117/12.842117
Event: SPIE LASE, 2010, San Francisco, California, United States

Abstract

A parallel processing of two-photon polymerization structuring is demonstrated with spatial light modulator. Spatial light modulator generates multi-focus spots on the sample surface via phase modulation technique controlled by computer generated hologram pattern. Each focus spot can be individually controlled in position and laser intensity with computer generated hologram pattern displayed on spatial light modulator. The multi-focus spots two-photon polymerization achieves the fabrication of asymmetric structure. Moreover, smooth sine curved polymerized line with amplitude of 5 μm and a period of 200 μm was obtained by fast switching of CGH pattern.

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Kotaro Obata, Jürgen Koch, and Boris N. Chichkov "Individually controlled multi-focus laser processing for two-photon polymerization", Proc. SPIE 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV, 75840L (17 February 2010); https://doi.org/10.1117/12.842117

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