Research on chemical cleaning technology for super-smooth surface of fused silica substrate

Lingyan Jiao; Yuzhu Jin; Yiqin Ji; Yi Tong; Fang Wang; Tao Liu; Lishuan Wang

doi:10.1117/12.867514

6 October 2010 Research on chemical cleaning technology for super-smooth surface of fused silica substrate

Lingyan Jiao, Yuzhu Jin, Yiqin Ji, Yi Tong, Fang Wang, Tao Liu, Lishuan Wang

Proceedings Volume 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 76552J (2010) https://doi.org/10.1117/12.867514
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

A chemical technology for cleaning super-smooth surface, based on wet method, is put forward in order to solve the problems including that the dirt existing on the surface of optical components is difficult to remove, and the system used to estimate the surface quality is hard to establish. Firstly, in this paper, all kinds of dirt existing on optical surface and their adsorption mechanism are discussed. Secondly, a cleaning route has been designed. Thirdly, all the reagents in use are prepared and their decontamination capabilities are described. Finally, the cleaned optical components are tested. The result shows that the surface cleanliness is high, the defect density is no more than 0.7/mm² within a certain area, and the scattering loss is no more than 20ppm.

Citation Download Citation

Lingyan Jiao, Yuzhu Jin, Yiqin Ji, Yi Tong, Fang Wang, Tao Liu, and Lishuan Wang "Research on chemical cleaning technology for super-smooth surface of fused silica substrate", Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 76552J (6 October 2010); https://doi.org/10.1117/12.867514

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