Surface damage mitigation of fused silica with CO2 laser

Xi-Bin Li; Hai-Bing Lv; Xia Xiang; Hai-Jun Wang; Meng Chen; Xiao-Dong Yuan; Wan-Guo Zheng

doi:10.1117/12.869088

6 October 2010 Surface damage mitigation of fused silica with CO₂ laser

Xi-Bin Li, Hai-Bing Lv, Xia Xiang, Hai-Jun Wang, Meng Chen, Xiao-Dong Yuan, Wan-Guo Zheng

Proceedings Volume 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 765533 (2010) https://doi.org/10.1117/12.869088
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

CO₂ laser with 10.6μm wavelength radiate on damage with size below 80μm. Through examining with 351nm wavelength ultra-violet, it is found the larger damage size is, the lower extent of damage threshold is enhanced. During mitigation, thermal stress resulted from short interaction time and asymmetrical temperature distribution. Radial crack generates after damage and could expand if exposed to ultraviolet laser. After annealed in an oven for 9 hours, crack in the sample was eliminated.

Citation Download Citation

Xi-Bin Li, Hai-Bing Lv, Xia Xiang, Hai-Jun Wang, Meng Chen, Xiao-Dong Yuan, and Wan-Guo Zheng "Surface damage mitigation of fused silica with CO₂ laser", Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 765533 (6 October 2010); https://doi.org/10.1117/12.869088

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