Manipulation and assembly of three-dimensional microparts produced by two-photon photo polymerization

Jung-Dae Kim; Sun-Uk Hwang; Hyun-Geun Shin; Yong-Gu Lee

doi:10.1117/12.860240

27 August 2010 Manipulation and assembly of three-dimensional microparts produced by two-photon photo polymerization

Jung-Dae Kim, Sun-Uk Hwang, Hyun-Geun Shin, Yong-Gu Lee

Author Affiliations +

Proceedings Volume 7762, Optical Trapping and Optical Micromanipulation VII; 776231 (2010) https://doi.org/10.1117/12.860240
Event: SPIE NanoScience + Engineering, 2010, San Diego, California, United States

Abstract

Microassembly has been identified as one of critical techniques in innovating the promising era of micro/nano technology. Several works have been investigated to fabricate various micro-devices such as micro-sensors and microactuators. Assembly plays an important role for fabricating micro-devices. However, there are only few studies in the assembly of microparts. In this paper, we present manipulation and assembly of three-dimensional microparts produced by two-photon polymerization where optical trapping technique was used to manipulate microparts. We show exemplary microassembly formed by assembling two microparts, a movable female part and a male part fixed on a glass substrate.

Citation Download Citation

Jung-Dae Kim, Sun-Uk Hwang, Hyun-Geun Shin, and Yong-Gu Lee "Manipulation and assembly of three-dimensional microparts produced by two-photon photo polymerization", Proc. SPIE 7762, Optical Trapping and Optical Micromanipulation VII, 776231 (27 August 2010); https://doi.org/10.1117/12.860240

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