Advanced laser mask repair in the current wafer foundry environment

Tod Robinson; Daniel Yi; Jeff LeClaire; Roy White; Ron Bozak; Mike Archuletta

doi:10.1117/12.864426

24 September 2010 Advanced laser mask repair in the current wafer foundry environment

Tod Robinson, Daniel Yi, Jeff LeClaire, Roy White, Ron Bozak, Mike Archuletta

Author Affiliations +

Proceedings Volume 7823, Photomask Technology 2010; 782320 (2010) https://doi.org/10.1117/12.864426
Event: SPIE Photomask Technology, 2010, Monterey, California, United States

Abstract

Contrary to the prior assumptions of its technical demise, deep UV (DUV) femtosecond pulsed laser repair of photomasks is continuing to mature and improve as a technology. Similar to the optical enhancements that allow for 193 nm wavelength light to continue being used down to the 32, or even in some cases 22 nm, node, the process regimes for this type of laser repair continue to expand as new processes are discovered. This work reviews the qualification of repair performance for production at a major wafer foundry site. In addition advances are shown in the area of through-pellicle repair (TRP) process development. These advances include the preferential (versus surrounding reference mask structures) removal of soft defects and the capability to remove or manipulate particles on top of a flat absorber region with no detectable removal of the absorber. These developments will further demonstrate the progressive decoupling of the laser repair spot size from the minimum technology node for laser repair.

Citation Download Citation

Tod Robinson, Daniel Yi, Jeff LeClaire, Roy White, Ron Bozak, and Mike Archuletta "Advanced laser mask repair in the current wafer foundry environment", Proc. SPIE 7823, Photomask Technology 2010, 782320 (24 September 2010); https://doi.org/10.1117/12.864426

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE