A full chip MB-SRAF placement using the SRAF guidance map

Min-Chun Tsai; Shigeki Nojima; Masahiro Miyairi; Tatsuo Nishibe; Been-Der Chen; Hanying Feng; William Wong; Zhangnan Zhu; Yen-Wen Lu

doi:10.1117/12.866139

24 September 2010 A full chip MB-SRAF placement using the SRAF guidance map

Min-Chun Tsai, Shigeki Nojima, Masahiro Miyairi, Tatsuo Nishibe, Been-Der Chen, Hanying Feng, William Wong, Zhangnan Zhu, Yen-Wen Lu

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Proceedings Volume 7823, Photomask Technology 2010; 78233Q (2010) https://doi.org/10.1117/12.866139
Event: SPIE Photomask Technology, 2010, Monterey, California, United States

Abstract

A fast model-based technique for SRAF placements is proposed in this paper. This technique first constructed an image pixel map with values presenting the sensitivity of improving process window on the desired pattern. The sensitivity value was derived based on contrast improvement with a defocus model. Then high value pixels were selected and constructed to form SRAF with MRC regulations. This technique does not require iterations to produce SRAF and achieves very fast runtime with simple mask shapes, thus can be used in full-chip productions. We called this technique the SRAF guidance map, SGM

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Min-Chun Tsai, Shigeki Nojima, Masahiro Miyairi, Tatsuo Nishibe, Been-Der Chen, Hanying Feng, William Wong, Zhangnan Zhu, and Yen-Wen Lu "A full chip MB-SRAF placement using the SRAF guidance map", Proc. SPIE 7823, Photomask Technology 2010, 78233Q (24 September 2010); https://doi.org/10.1117/12.866139

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