CO2 laser scribe of chemically strengthened glass with high surface compressive stress

Xinghua Li; Butchi R. Vaddi

doi:10.1117/12.874925

21 February 2011 CO2 laser scribe of chemically strengthened glass with high surface compressive stress

Xinghua Li, Butchi R. Vaddi

Proceedings Volume 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI; 79200U (2011) https://doi.org/10.1117/12.874925
Event: SPIE LASE, 2011, San Francisco, California, United States

Abstract

Chemically strengthened glass is finding increasing use in handheld, IT and TV cover glass applications. Chemically strengthened glass, particularly with high (>600MPa) compressive stress (CS) and deeper depth of layer (DOL), enable to retain higher strength after damage than non-strengthened glass when its surface is abraded. Corning Gorilla® Glass has particularly proven to be advantageous over competition in this attribute. However, due to high compressive stress (CS) and Central Tension (CT) cutting ion-exchanged glass is extremely difficult and often unmanageable where ever the applications require dicing the chemically strengthened mother glass into smaller parts. We at Corning have developed a CO₂ laser scribe and break method (LSB) to separate a single chemically strengthened glass sheet into plurality of devices. Furthermore, CO₂ laser scribe and break method enables debris-free separation of glass with high edge strength due to its mirror-like edge finish. We have investigated laser scribe and break of chemically strengthened glass with surface compressive stress greater than 600 MPa. In this paper we present the results of CO₂ scribe and break method and underlying laser scribing mechanisms. We demonstrated cross-scribe repetitively on GEN 2 size chemically strengthened glass substrates. Specimens for edge strength measurements of different thickness and CS/DOL glass were prepared using the laser scribe and break technique. The specimens were tested using the standard 4-point bend method and the results are presented.

Citation Download Citation

Xinghua Li and Butchi R. Vaddi "CO2 laser scribe of chemically strengthened glass with high surface compressive stress", Proc. SPIE 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI, 79200U (21 February 2011); https://doi.org/10.1117/12.874925

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