Assessment of illumination characteristics of soft x-ray laser-based full-field microscopes

Isela D. Howlett; Fernando Brizuela; Sergio Carbajo; Diana Peterson; Anne Sakdinawat; Yanwei Liu; David T. Attwood; Mario C. Marconi; Jorge J. Rocca; Carmen S. Menoni

doi:10.1117/12.892927

5 October 2011 Assessment of illumination characteristics of soft x-ray laser-based full-field microscopes

Isela D. Howlett, Fernando Brizuela, Sergio Carbajo, Diana Peterson, Anne Sakdinawat, Yanwei Liu, David T. Attwood, Mario C. Marconi, Jorge J. Rocca, Carmen S. Menoni

Author Affiliations +

Proceedings Volume 8140, X-ray Lasers and Coherent X-ray Sources: Development and Applications IX; 81400W (2011) https://doi.org/10.1117/12.892927
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

We present a method for the optimization of the illumination in soft x-ray (SXR) full-field microscopes. The method consists of imaging a single periodic grating with a period large compared to the wavelength of the illumination and obtaining its Fourier spectrum in two orthogonal directions. The analysis of the cut-off frequency along the two perpendicular directions allows the identification of angled illumination, which can be corrected in-situ by using the Fourier analysis iteratively. The ability to characterize the illumination conditions and aberrations in the EUV/SXR microscopes with a fast and simple analysis is critical to achieve the best quality images with the highest spatial resolution.

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Isela D. Howlett, Fernando Brizuela, Sergio Carbajo, Diana Peterson, Anne Sakdinawat, Yanwei Liu, David T. Attwood, Mario C. Marconi, Jorge J. Rocca, and Carmen S. Menoni "Assessment of illumination characteristics of soft x-ray laser-based full-field microscopes", Proc. SPIE 8140, X-ray Lasers and Coherent X-ray Sources: Development and Applications IX, 81400W (5 October 2011); https://doi.org/10.1117/12.892927

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