Study on infrared absorption of tungsten nanofilms

Xiaoxiong Zhou; Andi Zhao; Mingquan Yuan; Xiaomei Yu

doi:10.1117/12.911878

28 November 2011 Study on infrared absorption of tungsten nanofilms

Xiaoxiong Zhou, Andi Zhao, Mingquan Yuan, Xiaomei Yu

Proceedings Volume 8202, 2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology; 820217 (2011) https://doi.org/10.1117/12.911878
Event: International Conference on Optical Instruments and Technology (OIT2011), 2011, Beijing, Beijing, China

Abstract

Thin metallic films have several potential applications in MEMS field, and one of them is used as infrared absorber. In this paper, we first build a model of metallic infrared absorption and then discuss the transmission characteristics of infrared through metal and dielectric film. For a thin film material, the maximum absorption will occur when its sheet resistance equals to the impedance of free space. In order to verify the absorption property, tungsten (W) nanofilms with different thicknesses have been deposited and their characteristics of infrared absorption were experimentally studied. The infrared absorbance of W nanofilms increased as the thickness of the films increased; more than 50% IR radiation could be absorbed by W nanofilms at the wavelength of 8-12 μm.

Citation Download Citation

Xiaoxiong Zhou, Andi Zhao, Mingquan Yuan, and Xiaomei Yu "Study on infrared absorption of tungsten nanofilms", Proc. SPIE 8202, 2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology, 820217 (28 November 2011); https://doi.org/10.1117/12.911878

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