Closed-loop control for quasi-static MOEMS mirrors

A. Tortschanoff; D. Holzmann; M. Lenzhofer; T. Sandner

doi:10.1117/12.907825

15 February 2012 Closed-loop control for quasi-static MOEMS mirrors

A. Tortschanoff, D. Holzmann, M. Lenzhofer, T. Sandner

Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 82520T (2012) https://doi.org/10.1117/12.907825
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

In this paper we present closed-loop control for accurate positioning of micro optical mechanical system (MOEMS) based scanner mirrors. An analog and a microcontroller based implementation of the control loop have been implemented and are presented in this paper. In particular, the measured results are compared to the characteristics of the devices when driven in open loop mode. Settlings times and operating bandwidth can be improved by a factor of 10 compared to open loop operation. Digital implementations have advantages in terms of flexibility, but show limitations for fast signals due to time discretization.

Citation Download Citation

A. Tortschanoff, D. Holzmann, M. Lenzhofer, and T. Sandner "Closed-loop control for quasi-static MOEMS mirrors", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520T (15 February 2012); https://doi.org/10.1117/12.907825

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