Evaluation of damping ratio in a glass-based guided-wave optical microphone with a diaphragm

Masashi Ohkawa; Kazuya Murata; Takashi Sato

doi:10.1117/12.910286

1 February 2012 Evaluation of damping ratio in a glass-based guided-wave optical microphone with a diaphragm

Masashi Ohkawa, Kazuya Murata, Takashi Sato

Author Affiliations +

Proceedings Volume 8264, Integrated Optics: Devices, Materials, and Technologies XVI; 82641I (2012) https://doi.org/10.1117/12.910286
Event: SPIE OPTO, 2012, San Francisco, California, United States

Abstract

In a guided-wave optical microphone with a diaphragm used as a vibration plate, damping of diaphragm vibration is very significant in order to realize broad flat frequency response. In this study, a glass-based guided-wave optical microphone without a damping structure was experimentally examined to evaluate the damping ratio as the first phase in the optimization of damping. Damping ratio and resonance frequency were successfully evaluated to be 0.009 and 3.5 kHz, respectively, for a fabricated microphone with a diaphragm of 20 mm × 20 mm × 0.15 mm.

Citation Download Citation

Masashi Ohkawa, Kazuya Murata, and Takashi Sato "Evaluation of damping ratio in a glass-based guided-wave optical microphone with a diaphragm", Proc. SPIE 8264, Integrated Optics: Devices, Materials, and Technologies XVI, 82641I (1 February 2012); https://doi.org/10.1117/12.910286

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