Paper
28 November 2011 The effect of growth temperature on InAs quantum dots grown by MOCVD
Tianhe Li, Xin Guo, Qi Wang, Pengyu Wang, Zhigang Jia, Xiaomin Ren, Yongqing Huang, Shiwei Cai
Author Affiliations +
Proceedings Volume 8308, Optoelectronic Materials and Devices VI; 83082B (2011) https://doi.org/10.1117/12.917614
Event: SPIE/OSA/IEEE Asia Communications and Photonics, 2011, Shanghai, China
Abstract
The effect of growth temperature on InAs QDs grown by metal-organic chemical vapor deposition (MOCVD) was investigated in detail. Growth temperature affects InAs QDs in three ways, including the reconstruction mode of new InAs crystal faces, the migration length of adatoms, band gaps of InAs QDs, and the interaction among three aspects was studied. The variation of density, size and wavelength was experimentally demonstrated. The high density of 5.2×1010cm-2 was obtained. The room temperature wavelength of InAs/GaAs QDs using GaAs as capping layer reached 1240nm.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tianhe Li, Xin Guo, Qi Wang, Pengyu Wang, Zhigang Jia, Xiaomin Ren, Yongqing Huang, and Shiwei Cai "The effect of growth temperature on InAs quantum dots grown by MOCVD", Proc. SPIE 8308, Optoelectronic Materials and Devices VI, 83082B (28 November 2011); https://doi.org/10.1117/12.917614
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KEYWORDS
Indium arsenide

Gallium arsenide

Chemical species

Metalorganic chemical vapor deposition

Crystals

Atomic force microscopy

Temperature metrology

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