A primer of physical design for lithographers

Chi-Min Yuan

doi:10.1117/12.917447

14 March 2012 A primer of physical design for lithographers

Chi-Min Yuan

Author Affiliations +

Proceedings Volume 8327, Design for Manufacturability through Design-Process Integration VI; 83270E (2012) https://doi.org/10.1117/12.917447
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

In the SPIE Microlithography DFM conference, the number of papers related to physical design has been steadily increasing in the last few years. Since the majority of the audience in this conference has a background in lithography, some of the physical design-related terminologies and methods described in the presentation may be hard to understand. This paper gives a basic introduction to the physical design that is applicable to lithographers. The goal of the paper is not to enable a lithographer to begin working as a physical designer. Instead, it is to help lithographers understand some of the basics of physical design, so that they can better comprehend other DFM papers presented at the conference.

Citation Download Citation

Chi-Min Yuan "A primer of physical design for lithographers", Proc. SPIE 8327, Design for Manufacturability through Design-Process Integration VI, 83270E (14 March 2012); https://doi.org/10.1117/12.917447

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE