Study on the precision measurement of high-flux large aperture sampling grating

Haoyu Yuan; Yong-quan Chen; Zhi-tao Peng; Ya-xuan Duan; Jianhong Wu; Shaojun Fu

doi:10.1117/12.2002127

15 October 2012 Study on the precision measurement of high-flux large aperture sampling grating

Haoyu Yuan, Yong-quan Chen, Zhi-tao Peng, Ya-xuan Duan, Jianhong Wu, Shaojun Fu

Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 84170W (2012) https://doi.org/10.1117/12.2002127
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

This paper describes an effective method for the measurements of large aperture sampling grating, the sampling efficiency the sampling focal length and the sampling angle. By using a 351nm collimation laser source to scan the full aperture of the sampling grating in every subregion, the diffraction power of “0” order and “+1” order can be obtained synchronously by two standard integrating balls, And then by calculating the sampling efficiency of this subregion and splicing the acquisition data, we can get the averaged grating sampling efficiency in the full aperture.Based on this method, we can effectively eliminate the effect of the output instability of laser source, decrease the uncertainty of test results. According to the fabrication principle of the sampling grating, measurements for the sampling focal length and the sampling angle can be performed. Test rersults indicate that this method can be used to measure large aperture sampling gratings

Citation Download Citation

Haoyu Yuan, Yong-quan Chen, Zhi-tao Peng, Ya-xuan Duan, Jianhong Wu, and Shaojun Fu "Study on the precision measurement of high-flux large aperture sampling grating", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84170W (15 October 2012); https://doi.org/10.1117/12.2002127

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KEYWORDS

Mirrors

Diffraction gratings

Power meters

Calibration

Diffraction

Laser sources

Precision measurement

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