Study on thermal damage of Diamond-like carbon films based on the finite element method

Yao Zeng; Lihong Yang

doi:10.1117/12.973696

15 October 2012 Study on thermal damage of Diamond-like carbon films based on the finite element method

Yao Zeng, Lihong Yang

Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 841714 (2012) https://doi.org/10.1117/12.973696
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Studying on laser damage mechanism of optical thin film is the basis for film laser damage resistance. Thermal injury is one of the key factors in the major causes of optical thin film laser damage. Researching laser thermal injury, analysis of characteristics of thermal injury, is an important assure to improve the film resistance properties. Based on the laser thermal injury theory, used the finite element method for the analysis of thermal injury effect in diamond-like carbon(DLC) films which irradiated by 1064nm Nd: YAG laser. A model for the DLC films thermal injury temperature field is established, we studied the thermal injury caused by Nd: YAG laser in Diamond-like carbon films, and used the finite element analysis method for analysis, operated ANSYS to simulate and calculate the temperature distribution while the film is under laser irradiation. By calculating the stress distribution, the reason of thermal damage is analyzed.

Citation Download Citation

Yao Zeng and Lihong Yang "Study on thermal damage of Diamond-like carbon films based on the finite element method", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841714 (15 October 2012); https://doi.org/10.1117/12.973696

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