Experimental study on virtual spatially extended source

Yan Xu; Yongjian Wan; Yongqian Wu

doi:10.1117/12.977333

15 October 2012 Experimental study on virtual spatially extended source

Yan Xu, Yongjian Wan, Yongqian Wu

Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 84173X (2012) https://doi.org/10.1117/12.977333
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

One of the most important factor in influencing interferometer measurement accuracy is coherent noise .To improve measurement accuracy, the coherent noise of interferometric system should be reduced effectively. A new method of generating virtually extended source is described in this paper, which can suppress coherent noise effectively and verified by experiment. Experiments of comparing with traditional point source show that the virtually extended source can suppress coherent noise effectively and preserve the fringe contrast. There is no Newton rings in the phase map in evidence. The experiments show the wedge angle to be chosen between 8 minutes and 17minutes for a better results. The final measurement about surface profile show the method with virtually extended source has lower RMS value.

Citation Download Citation

Yan Xu, Yongjian Wan, and Yongqian Wu "Experimental study on virtual spatially extended source", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84173X (15 October 2012); https://doi.org/10.1117/12.977333

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