Paper
9 May 2012 Simulation of surface plasmon fiber-optic sensor including the effect of oxide overlayer thickness change
Dalibor Ciprian, Petr Hlubina
Author Affiliations +
Abstract
A theoretical model of surface plasmon resonance (SPR) fiber-optic sensor based on the theory of attenuated total internal reflection is presented. The analysis of the sensor response is carried out in frame of optics of multilayered media. Some of the studied SPR sensors use the oxide or semiconductor overlayer for the protection of the metallic layer generating the surface plasmon wave. In the same time, the overlayer can help to improve the sensitivity of the sensor. The semiconductor overlayer protects the metal against the oxidation, but a native oxide layer can be formed on its top surface, when exposed to the atmosphere. This effect has been scarcely addressed, even if it can have an influence on the functionality of the sensor. In our case, the structure contained a metallic layer covered by silicon with oxide layer. The influence of the oxide layer thickness on the sensor performance in wavelength domain is studied in detail. The calculation of optical power transmitted through the multimode sensing fiber is carried out in order to evaluate the response of the sensor. The effect of the dispersion of all involved media is taken into account. The thickness of the metal layer in the sensing structure has been optimized to achieve the most pronounced dip at the resonance condition. The performance of the sensor is described in terms of sensitivity and detection accuracy.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dalibor Ciprian and Petr Hlubina "Simulation of surface plasmon fiber-optic sensor including the effect of oxide overlayer thickness change", Proc. SPIE 8439, Optical Sensing and Detection II, 843927 (9 May 2012); https://doi.org/10.1117/12.922513
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Cited by 2 scholarly publications.
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KEYWORDS
Gold

Sensors

Oxides

Silicon

Surface plasmons

Fiber optics sensors

Refractive index

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