Mechanisms of image formation in SEM

Yu. V. Larionov; Yu. A. Novikov

doi:10.1117/12.2016850

8 January 2013 Mechanisms of image formation in SEM

Yu. V. Larionov, Yu. A. Novikov

Proceedings Volume 8700, International Conference Micro- and Nano-Electronics 2012; 87000W (2013) https://doi.org/10.1117/12.2016850
Event: International Conference on Micro-and Nano-Electronics 2012, 2012, Zvenlgorod, Russian Federation

Abstract

Semi empirical model of image formation is proposed for scanning electron microscope (SEM) working in low and high voltage modes with registration of back scattered (BSE) and slow secondary (SSE) electrons. The model is based on analysis of experiments executed with a test object with trapezoidal profile and with large slope angles scanned in a SEM. The model is designated for application in virtual SEM.

Citation Download Citation

Yu. V. Larionov and Yu. A. Novikov "Mechanisms of image formation in SEM", Proc. SPIE 8700, International Conference Micro- and Nano-Electronics 2012, 87000W (8 January 2013); https://doi.org/10.1117/12.2016850

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