Paper
31 January 2013 A comparison of cylindricity and parallelism measurement procedures between HIT UOI and PTB
Otto Jusko, Jingzhi Huang, Wei Gu, Helge Reimann
Author Affiliations +
Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 87590L (2013) https://doi.org/10.1117/12.2014269
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China
Abstract
PTB and the HIT Institute UOI (Center of Ultra-precision Optoelectronic Instrument) have developed special error separation procedures for improving the measurement uncertainty of cylinder calibrations. Three glass cylinders, which were custom-made by HIT, were selected to compare the performance and characteristics of the measurement procedures. Both procedures effectively eliminate guidance errors of the measurement machines and lead to sufficiently low measurement uncertainties.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Otto Jusko, Jingzhi Huang, Wei Gu, and Helge Reimann "A comparison of cylindricity and parallelism measurement procedures between HIT UOI and PTB", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87590L (31 January 2013); https://doi.org/10.1117/12.2014269
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Cited by 2 scholarly publications.
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KEYWORDS
Glasses

Mirrors

Calibration

Interferometers

Optoelectronics

Error analysis

Metals

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