Absolute scale-based imaging position encoder with submicron accuracy

Andrey G. Anisimov; Anton V. Pantyushin; Oleg U. Lashmanov; A. S. Vasilev; Alexander N. Timofeev; Valery V. Korotaev; Sergey V. Gordeev

doi:10.1117/12.2021022

13 May 2013 Absolute scale-based imaging position encoder with submicron accuracy

Andrey G. Anisimov, Anton V. Pantyushin, Oleg U. Lashmanov, A. S. Vasilev, Alexander N. Timofeev, Valery V. Korotaev, Sergey V. Gordeev

Author Affiliations +

Proceedings Volume 8788, Optical Measurement Systems for Industrial Inspection VIII; 87882T (2013) https://doi.org/10.1117/12.2021022
Event: SPIE Optical Metrology 2013, 2013, Munich, Germany

Abstract

Study is devoted to experimental research and development of absolute imaging position encoder based on standard calibrated scale of invar alloy with 1 mm spacing. The encoder uses designed imaging system as a vernier and absolute magnetic encoder as a rough indication. The features of optical design, choice and use of imaging system as long as indexes images processing algorithm are described. A shadow method was implemented: indexes images on a CCD array are formed by the lens focused at the scale surface; the laser module lights up the scale through a beam-splitting prism by a parallel beam. Further dark indexes images on a light scale background are detected and analyzed to estimate the encoder position. Full range of experimental tests was set to calibrate the encoder and to estimate the accuracy. As a result, accuracy close to 1 μm at 1 m was achieved.

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Andrey G. Anisimov, Anton V. Pantyushin, Oleg U. Lashmanov, A. S. Vasilev, Alexander N. Timofeev, Valery V. Korotaev, and Sergey V. Gordeev "Absolute scale-based imaging position encoder with submicron accuracy", Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 87882T (13 May 2013); https://doi.org/10.1117/12.2021022

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